真空蒸發鍍膜法與磁控濺射法的太陽膜制造工藝
現在(zai)市面上好的(de)太陽膜制造工藝多半兩種,一(yi)種是(shi)真(zhen)空(kong)蒸發鍍(du)膜工藝,一(yi)種是(shi)磁控濺射工藝。
太陽(yang)膜制造(zao)工藝分類(lei):
1.真(zhen)空(kong)蒸(zheng)(zheng)發鍍(du)(du)(du)(du)膜(mo)法太陽膜(mo)制造(zao)工(gong)藝(yi)就是在(zai)1.310-2~1.310-3Pa(10-4~10-5Torr)的(de)(de)真(zhen)空(kong)中以(yi)電(dian)阻加熱鍍(du)(du)(du)(du)膜(mo)材(cai)(cai)(cai)料,使它在(zai)極短的(de)(de)時間(jian)內(nei)蒸(zheng)(zheng)發,蒸(zheng)(zheng)發了的(de)(de)鍍(du)(du)(du)(du)膜(mo)材(cai)(cai)(cai)料分(fen)子(zi)沉積(ji)在(zai)基材(cai)(cai)(cai)表冇上形成鍍(du)(du)(du)(du)膜(mo)層(ceng)。真(zhen)空(kong)鍍(du)(du)(du)(du)膜(mo)室是使鍍(du)(du)(du)(du)膜(mo)材(cai)(cai)(cai)料蒸(zheng)(zheng)發的(de)(de)蒸(zheng)(zheng)發源,還有支承基材(cai)(cai)(cai)的(de)(de)工(gong)作架或卷(juan)繞(rao)裝置都是真(zhen)空(kong)蒸(zheng)(zheng)發鍍(du)(du)(du)(du)膜(mo)設備的(de)(de)主要部分(fen)。鍍(du)(du)(du)(du)膜(mo)室的(de)(de)真(zhen)空(kong)度,鍍(du)(du)(du)(du)膜(mo)材(cai)(cai)(cai)料的(de)(de)蒸(zheng)(zheng)發熟(shu)練(lian)地(di),蒸(zheng)(zheng)發距(ju)離(li)和蒸(zheng)(zheng)發源的(de)(de)間(jian)距(ju),以(yi)及基材(cai)(cai)(cai)表面狀態和溫度都是影響鍍(du)(du)(du)(du)膜(mo)質量的(de)(de)因素。
2.磁(ci)控濺射法(fa)太陽(yang)膜(mo)(mo)制(zhi)造工(gong)藝(yi)是指電(dian)(dian)(dian)(dian)子(zi)(zi)(zi)(zi)(zi)(zi)在(zai)(zai)電(dian)(dian)(dian)(dian)場(chang)的(de)(de)作(zuo)(zuo)用下加速飛向(xiang)(xiang)(xiang)基(ji)片(pian)的(de)(de)過(guo)(guo)程(cheng)(cheng)中(zhong)與(yu)氬原(yuan)(yuan)子(zi)(zi)(zi)(zi)(zi)(zi)發生碰撞,電(dian)(dian)(dian)(dian)離出(chu)大量的(de)(de)氬離子(zi)(zi)(zi)(zi)(zi)(zi)和電(dian)(dian)(dian)(dian)子(zi)(zi)(zi)(zi)(zi)(zi),電(dian)(dian)(dian)(dian)子(zi)(zi)(zi)(zi)(zi)(zi)飛向(xiang)(xiang)(xiang)基(ji)片(pian)。氬離子(zi)(zi)(zi)(zi)(zi)(zi)在(zai)(zai)電(dian)(dian)(dian)(dian)場(chang)的(de)(de)作(zuo)(zuo)用下加速轟(hong)擊靶(ba)(ba)材(cai),濺射出(chu)大量的(de)(de)靶(ba)(ba)材(cai)原(yuan)(yuan)子(zi)(zi)(zi)(zi)(zi)(zi),呈中(zhong)性的(de)(de)靶(ba)(ba)原(yuan)(yuan)子(zi)(zi)(zi)(zi)(zi)(zi)(或分子(zi)(zi)(zi)(zi)(zi)(zi))沉積在(zai)(zai)基(ji)片(pian)上成膜(mo)(mo)。二(er)次(ci)電(dian)(dian)(dian)(dian)子(zi)(zi)(zi)(zi)(zi)(zi)在(zai)(zai)加速飛向(xiang)(xiang)(xiang)基(ji)片(pian)的(de)(de)過(guo)(guo)程(cheng)(cheng)中(zhong)受(shou)到磁(ci)場(chang)洛(luo)侖磁(ci)力的(de)(de)影響,被束縛在(zai)(zai)靠(kao)近靶(ba)(ba)面(mian)的(de)(de)等(deng)離子(zi)(zi)(zi)(zi)(zi)(zi)體(ti)區(qu)域內(nei),該區(qu)域內(nei)等(deng)離子(zi)(zi)(zi)(zi)(zi)(zi)體(ti)密度很高,二(er)次(ci)電(dian)(dian)(dian)(dian)子(zi)(zi)(zi)(zi)(zi)(zi)在(zai)(zai)磁(ci)場(chang)的(de)(de)作(zuo)(zuo)用下圍繞靶(ba)(ba)面(mian)作(zuo)(zuo)圓周(zhou)運動(dong),該電(dian)(dian)(dian)(dian)子(zi)(zi)(zi)(zi)(zi)(zi)的(de)(de)運動(dong)路徑很長,在(zai)(zai)運動(dong)過(guo)(guo)程(cheng)(cheng)中(zhong)不(bu)斷的(de)(de)與(yu)氬原(yuan)(yuan)子(zi)(zi)(zi)(zi)(zi)(zi)發生碰撞電(dian)(dian)(dian)(dian)離出(chu)大量的(de)(de)氬離子(zi)(zi)(zi)(zi)(zi)(zi)轟(hong)擊靶(ba)(ba)材(cai),經過(guo)(guo)多次(ci)碰撞后電(dian)(dian)(dian)(dian)子(zi)(zi)(zi)(zi)(zi)(zi)的(de)(de)能(neng)量逐(zhu)漸降低,擺脫(tuo)磁(ci)力線的(de)(de)束縛,遠(yuan)離靶(ba)(ba)材(cai),最終沉積在(zai)(zai)基(ji)片(pian)上。
磁(ci)控濺射(she)太(tai)陽膜(mo)制造工藝的(de)特點(dian)是成膜(mo)速率(lv)高,基片溫度低,膜(mo)的(de)粘附性好,可實現(xian)大面積鍍(du)膜(mo)。該技術可以(yi)分為直流磁(ci)控濺射(she)法(fa)和射(she)頻磁(ci)控濺射(she)法(fa)。
磁控濺(jian)(jian)射設備一(yi)般(ban)根據所采用的電(dian)源的不同(tong)又可(ke)分(fen)為直(zhi)(zhi)流(liu)濺(jian)(jian)射和(he)射頻濺(jian)(jian)射兩種。直(zhi)(zhi)流(liu)磁控濺(jian)(jian)射的特點是在(zai)(zai)陽極基片和(he)陰極靶(ba)(ba)之(zhi)間加一(yi)個(ge)直(zhi)(zhi)流(liu)電(dian)壓,陽離子在(zai)(zai)電(dian)場的作用下轟擊靶(ba)(ba)材(cai),它的濺(jian)(jian)射速率一(yi)般(ban)都(dou)比較大。但是直(zhi)(zhi)流(liu)濺(jian)(jian)射一(yi)般(ban)只能用于金屬靶(ba)(ba)材(cai),因為如果是絕緣體靶(ba)(ba)材(cai),則由于陽粒(li)子在(zai)(zai)靶(ba)(ba)表(biao)面積累,造成(cheng)所謂(wei)的靶(ba)(ba)中(zhong)毒,濺(jian)(jian)射率越來越低。
磁控濺射(she)法(fa)與(yu)蒸(zheng)(zheng)(zheng)發(fa)法(fa)太陽膜(mo)制(zhi)造(zao)工(gong)藝(yi)相比(bi),具有鍍(du)(du)膜(mo)層(ceng)與(yu)基(ji)材層(ceng)的結合力強(qiang),鍍(du)(du)膜(mo)層(ceng)致密,均(jun)勻等優(you)(you)點(dian)。真(zhen)空(kong)蒸(zheng)(zheng)(zheng)發(fa)鍍(du)(du)膜(mo)法(fa)需(xu)要使金屬或金屬化(hua)(hua)合物(wu)蒸(zheng)(zheng)(zheng)發(fa)氣化(hua)(hua),而(er)加熱溫度又不能太高(gao),否則(ze)氣相蒸(zheng)(zheng)(zheng)鍍(du)(du)金屬會燒壞被(bei)塑料(liao)基(ji)材,因此(ci),真(zhen)空(kong)蒸(zheng)(zheng)(zheng)鍍(du)(du)法(fa)一般僅適用(yong)于(yu)鋁等熔(rong)點(dian)較(jiao)(jiao)低(di)的金屬源,是(shi)(shi)目前(qian)應用(yong)較(jiao)(jiao)為廣泛的真(zhen)空(kong)鍍(du)(du)膜(mo)工(gong)藝(yi)。相反,噴濺鍍(du)(du)膜(mo)法(fa)利(li)用(yong)高(gao)壓電場激(ji)發(fa)產生等離子體(ti)鍍(du)(du)膜(mo)物(wu)質,適用(yong)于(yu)幾乎所有高(gao)熔(rong)點(dian)金屬,合金、非金屬及金屬化(hua)(hua)合物(wu)鍍(du)(du)膜(mo)源物(wu)質,如鉻,鉬,鎢(wu),鈦,銀,金等。而(er)且它是(shi)(shi)一種(zhong)強(qiang)制(zhi)性的沉積過程,采(cai)用(yong)該法(fa)獲得的鍍(du)(du)膜(mo)層(ceng)與(yu)基(ji)材附(fu)著力遠高(gao)于(yu)真(zhen)空(kong)蒸(zheng)(zheng)(zheng)發(fa)鍍(du)(du)法(fa),鍍(du)(du)膜(mo)層(ceng)具有致密,均(jun)勻等優(you)(you)點(dian),加工(gong)成本(ben)也相對較(jiao)(jiao)高(gao)。
兩種太陽膜制造工藝,其光學性能也有差別。太陽膜的光學性能,主要是紫外線阻隔率,紅外線阻隔率和可見光透過率。不管是那種工藝,都可以用全波段太陽膜測試儀來測量其光學參數。
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